Micro-disperse particles as probes for plasma surface interaction
Micro-disperse particles as probes for plasma surface interaction
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DOI：
10.1016/s0040-6090(00)01439-5
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发表时间：
2000-12-01
期刊：
影响因子：
2.1
通讯作者：
Kroesen, GMW
中科院分区：
文献类型：
--
作者：
Kersten, H;Deutsch, H;Kroesen, GMW
例如，粉末颗粒已被用作微探针，用于确定电极和衬底前的电场，以及观察等离子体和表面之间的能量通量。通过观察粒子的位置和运动与放电参数的关系，我们得到了关于电极前电场的信息，约为350V/m，为此，采用了一个适合的模型来确定粉尘电荷，在我们的情况下为7000e数量级。粒子的平衡温度是由来自等离子体的不同能量通量的结果，由100-200℃量级的微小粒子的温度依赖荧光确定的。在Ar等离子体的情况下，电荷载流子复合对粒子的加热可以确定为主要的能量贡献，而损失是由辐射和传导引起的。朝向粒子的能量通量约为0.1J/cm(2)S。(C)2000爱思唯尔科学公司保留所有权利。
Powder particles have been used, for instance, as micro-probes for the determination of the electric field in front of electrodes and substrates, as well as for the observation of energy fluxes between plasma and surfaces. By observing the position and movement of the particles dependent on the discharge parameters, we obtained information on the electric field in front of the electrode to be in the order of 350 V/m. For this purpose an adapted model has been employed for determining the dust charge, which in our case was of the order of 7000e. The equilibrium temperature of the particles, which is a result of the different energy fluxes from the plasma, has been determined by temperature-dependent fluorescence of the micro-particles to be of the order of 100-200 degreesC. In case of an argon plasma the heating of the particles by charge carrier recombination could be identified as dominant energetic contribution, while the losses are due to radiation and conduction. The energy flux towards the particles is approximately 0.1 J/cm(2)s. (C) 2000 Elsevier Science B.V. All rights reserved.