MATSUI KENJI: "INFLUENCE OF SUBSTRATE BIAS ON HYDROGENATED AMORPHOUS CARBON FILMS PREPARED BY VHF SPUTTERING"BULLTIN OF THE FUCULTY OF ENGINEERING UNIVERSITY OF THE RYUKYUS. NO.59. 101-106 (2000)
MATSUI KENJI: "INFLUENCE OF SUBSTRATE BIAS ON HYDROGENATED AMORPHOUS CARBON FILMS PREPARED BY VHF SPUTTERING"BULLTIN OF THE FUCULTY OF ENGINEERING UNIVERSITY OF THE RYUKYUS. NO.59. 101-106 (2000)
复制标题
松井贤治：“基板偏压对甚高频溅射制备的氢化非晶碳薄膜的影响”琉球工程大学系通报。
DOI：
--
复制
发表时间：
--
期刊：
影响因子：
--
通讯作者：
中科院分区：
文献类型：
--
作者：
