Boron-doped a-Si:H/c-Si interface passivation:: Degradation mechanism
Boron-doped a-Si:H/c-Si interface passivation:: Degradation mechanism
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DOI:
10.1063/1.2783972
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发表时间:
2007-09-10
影响因子:
4
通讯作者:
Kondo, Michio
中科院分区:
文献类型:
--
作者:
De Wolf, Stefaan;Kondo, Michio
The authors report that for a-Si:H/c-Si heterostructure solar cell fabrication the presence of a boron-doped a-Si:H(p(+)) overlayer may cause H-2 effusion from a (few nanometers) thin underlying intrinsic a-Si:H(i) film at moderate temperatures. This phenomenon is in agreement with losses in the electronic passivation quality of c-Si/a-Si:H(i)/a-Si:H(p(+)) structures occurring during low temperature (