Negative Hydrogen Ions Produced by Electron Temperature Control in an RF Plasma
Negative Hydrogen Ions Produced by Electron Temperature Control in an RF Plasma
复制标题
射频等离子体中电子温度控制产生的负氢离子
DOI：
10.1143/jjap.36.4551
复制
发表时间：
1997
影响因子：
1.5
通讯作者：
N. Sato
中科院分区：
文献类型：
--
作者：
S. Iizuka;K. Kato;A. Takahashi;K. Nakagomi;N. Sato
本文采用栅控电子温度的方法研究了氢射频等离子体中负氢离子的形成。利用栅网法在腔室的不同区域产生了高、低电子温度等离子体，其中下游区域的电子温度由栅网电位控制。负离子的产生速率强烈地依赖于栅极电势。我们观察到有效的负氢离子生产在下游区域时，网格是负偏置的氢压力范围为2-5毫托。
The formation of negative hydrogen ions is investigated in a pure hydrogen RF plasma using a grid-method for electron temperature control. Using the grid method we produce both high and low electron temperature plasmas in the separated regions in the chamber, in which the electron temperature in the downstream region is controlled by the grid potential. The production rate of negative ions depends strongly on the grid potential. We observe efficient negative hydrogen ion production in the downstream region when the grid is negatively biased in the hydrogen pressure range of 2–5 mTorr.