J.OTSUKA, N.IIDA, Y.KAWASE, R.AKINO and S.FUKADA: "Ultra-precision Positioning Using Lead Screw Drive (3rd Report) - Nanometer Accuracy Positioning and Settling Time Reduction" J.of Japan Society for Precision Engineering. 59,10 (in Japanese). 1655-1661 (
J.OTSUKA, N.IIDA, Y.KAWASE, R.AKINO and S.FUKADA: "Ultra-precision Positioning Using Lead Screw Drive (3rd Report) - Nanometer Accuracy Positioning and Settling Time Reduction" J.of Japan Society for Precision Engineering. 59,10 (in Japanese). 1655-1661 (
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J.OTSUKA、N.IIDA、Y.KAWASE、R.AKINO 和 S.FUKADA：“使用丝杠驱动的超精密定位（第三次报告）- 纳米级精度定位和稳定时间缩短” J.of Japan Society for Precision Engineering
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