Atomic force microscopy dynamic modes: modeling and applications
Atomic force microscopy dynamic modes: modeling and applications
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DOI：
10.1088/0953-8984/20/22/225012
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发表时间：
2008-06-04
影响因子：
2.7
通讯作者：
Bhushan, Bharat
中科院分区：
文献类型：
--
作者：
Song, Yaxin;Bhushan, Bharat
本文综述了原子力显微镜（AFM）模式建模和应用的发展。原子力显微镜通常用于原子和纳米尺度的表面测量。AFM有两种工作模式：静态模式和动态模式。在动态AFM模式下，悬臂梁由其保持器或样品驱动振动。利用探针与样品相互作用引起的悬臂梁振动参数的变化来揭示样品的表面特性。能够准确模拟表面耦合悬臂梁动力学的分析和数值模型对于解释原子力显微镜扫描图像和评估样本的材料特性至关重要。本文的目的是分类现有的AFM动态模式和测量技术的悬臂梁偏转和激励机制，总结文献中提出的AFM悬臂梁模型，并展示这些模型在AFM模式模拟的应用。基于悬臂梁响应与针尖-样品相互作用之间的关系，描述了定量评估样品力学参数的方法。
This paper contains a review of the development in modeling and applications of atomic force microscopy (AFM) modes. AFM is commonly used for atomic and nano-scale surface measurement. Two operational modes of AFM exist: static mode and dynamic mode. In dynamic AFM mode, a cantilever is driven to vibrate by its holder or the sample. The changes of cantilever vibration parameters due to tip-sample interaction are used to reveal surface properties of samples. Analytical and numerical models that can accurately simulate surface-coupled cantilever dynamics are essential for explaining AFM scanning images and evaluating a sample's material properties. The objective of this paper is to categorize the existing AFM dynamic modes and measurement techniques in terms of cantilever deflection and excitation mechanism, summarize AFM cantilever models presented in the literature, and demonstrate the applications of these models in AFM mode simulations. Based on the relations between cantilever responses and tip-sample interaction, methods for quantitative evaluation of a sample's mechanical parameters are described.