PLASMA-ASSISTED NITRIDING OF ALUMINUM
PLASMA-ASSISTED NITRIDING OF ALUMINUM
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DOI：
10.1016/0257-8972(94)90100-7
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发表时间：
1994-06-01
影响因子：
5.4
通讯作者：
MAYR, P
中科院分区：
文献类型：
--
作者：
CHEN, HY;STOCK, HR;MAYR, P
在改进的脉动直流等离子渗氮装置中对Al 99.5、AlMgSi0.5和AlZnMgCu1.5(1050、6063和7075)三种铝材进行了氮化处理。电源。在氮化之前，样品在氩和氢的混合气体中用等离子体辅助溅射过程进行清洗。在三种衬底材料的表面都形成了光亮的六方晶系黑色氮化铝(AlN)层，但也观察到了AlN层的变形、微裂纹和分层。因此，只有适当调整渗氮工艺参数，特别是渗氮时间和渗氮温度，使渗层厚度控制在3微米以下，才能获得硬度高、附着力好的氮化层。渗氮处理后的试件耐磨性较未渗氮处理的显著提高。另一方面，AlN层在1N HCI中的耐蚀性只有在Al 99.5渗氮后才能得到显著提高。
Three aluminium materials, Al 99.5, AlMgSi 0.5 and AlZnMgCu 1.5 (1050, 6063 and 7075), were nitrided in a modified plasma-nitriding unit with a pulsating d.c. power supply. Prior to nitriding, the samples were cleaned in a plasma-assisted sputtering process in gas mixtures of argon and hydrogen. Shiny black aluminium nitride (AlN) layers with hexagonal crystal structure were formed on top of all three substrate materials, but distortion, microcracks and delamination of the AlN layers were observed too. Therefore AlN layers with high hardness and good adhesion could be obtained only by a proper adjustment of the nitriding parameters, especially the nitriding time and temperature, to keep the thickness of the AlN layer below about 3 mum. The wear resistance of the nitrided specimens was significantly increased compared with those without nitriding treatment. On the other hand, a significant increase in corrosion resistance of the AlN layer in 1N HCI could be achieved only by using nitrided Al 99.5 specimens.