Integrated optical sensor in a digital microfluidic platform
Integrated optical sensor in a digital microfluidic platform
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DOI：
10.1109/jsen.2008.918717
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发表时间：
2008-05-01
影响因子：
4.3
通讯作者：
Fair, Richard B.
中科院分区：
文献类型：
--
作者：
Luan, Lin;Evans, Randall D.;Fair, Richard B.
数字微流控芯片实验室（LoC）技术的出现为开发诊断应用提供了一个平台，具有便携性、自动化程度提高、低功耗、与大规模制造兼容以及高通量等优点。然而，大多数数字微流体平台包含有限的光学能力（例如，光学传输），因为更复杂的光学功能难以集成到数字微流体平台中。这是因为传感器必须与发生电湿润液体传输的疏水性表面兼容。随着异质光子组件集成技术（诸如本文所述的那些）的出现，集成高级光子组件的机会已经大大扩展。许多诊断应用可以受益于更先进的小型化光学传感技术的集成，例如折射率传感器（表面等离子体共振传感器、微谐振器传感器等）。这些异质集成技术的出现使得能够将薄膜半导体器件集成到任意的主衬底上，使得能够将更复杂的光学功能（特别是平面光学系统）集成到微流体系统中。本文提出了一种集成光学传感器的基础上异质集成的InGaAs基薄膜光电探测器与数字微流控系统。这种有源光学薄膜器件与数字微流体系统的异构集成和操作的演示是在该平台上实现整个平面光学传感系统异构集成的第一步。
The advent of digital microfluidic lab-on-a-chip (LoC) technology offers a platform for developing diagnostic applications with the advantages of portability, increased automation, low-power consumption, compatibility with mass manufacturing, and high throughput. However, most digital microfluidic platforms incorporate limited optical capabilities (e.g., optical transmission) for integrated sensing, because more complex optical functions are difficult to integrate into the digital microfluidic platform. This follows since the sensor must be compatible with the hydrophobic surfaces on which electrowetting liquid transport occurs. With the emergence of heterogeneous photonic component integration technologies such as those described herein, the opportunity for integrating advanced photonic components has expanded considerably. Many diagnostic applications could benefit from the integration of more advanced miniaturized optical sensing technologies, such as index of refraction sensors (surface plasmon resonance sensors, microresonator sensors, etc.). The advent of these heterogeneous integration technologies, that enable the integration of thin-film semiconductor devices onto arbitrary host substrates, enables more complex optical functions, and in particular, planar optical systems, to be integrated into microfluidic systems. This paper presents an integrated optical sensor based upon the heterogeneous integration of an InGaAs-based thin-film photodetector with a digital microfluidic system. This demonstration of the heterogeneous integration and operation of an active optical thin-film device with a digital microfluidic system is the first step toward the heterogeneous integration of entire planar optical sensing systems on this platform.