Design and Fabrication of a Long-Arm Comb-Drive Rotary Actuator With Externally Mounted Mirror for Optical Applications
Design and Fabrication of a Long-Arm Comb-Drive Rotary Actuator With Externally Mounted Mirror for Optical Applications
复制标题
DOI：
10.1109/jmems.2015.2423285
复制
发表时间：
2015-10-01
影响因子：
2.7
通讯作者：
Jaeger, Wolfgang
中科院分区：
文献类型：
--
作者：
Amin, Talukder Mohammad Fahim;Huda, Mohammad Quamrul;Jaeger, Wolfgang
在本文中，我们提出了一种长臂梳状驱动器的设计，制造和表征与外部安装的光学应用的大镜子。提供外部安装的镜子对于许多需要大且高质量反射表面的光学应用非常有用。梳齿在远端处的角度伸展保持小于靠近锚点的角度伸展。这种结构特征允许设计超过5 mm的致动器臂长度。致动器的桁架被精心设计，以支持大型活动臂。静电力在致动器中的分析模型，并进行了详细的分析，侧不稳定性和共振频率。介绍了采用双掩模工艺对绝缘体上硅（SOI）晶片进行体微机械加工的完整工艺过程。一个程序，有效地安装的镜子，利用芯片键合机，真空吸头，和银环氧树脂的演示。静态特性测量结果表明，致动器可以实现3度的旋转角与施加的电压为130 V.一个谐振频率为246 Hz的反射镜尺寸为2 mm × 100 μ m × 1 mm的光学特性确定，这密切匹配的模拟结果和分析模型。[2014- 03 - 18]
In this paper, we present the design, fabrication, and characterization of a long-arm comb-drive actuator with an externally mounted large mirror for optical applications. The provision for an externally mounted mirror can be useful for many optical applications, which require large and high-quality reflecting surfaces. The angular stretch of the comb fingers at the far end is kept smaller than those near the anchor point. This structural feature allows the design of actuator arm lengths of over 5 mm. The truss of the actuator is designed carefully to support the large movable arm. An analytical model for the electrostatic forces in the actuator was developed, and detailed analyses for side instability and resonance frequency were performed. The complete fabrication process involving bulk micromachining of silicon-on-insulator (SOI) wafer using a two-mask process is described. A procedure for efficient mounting of the mirror utilizing die bonder, vacuum tip, and silver epoxy is demonstrated. Static characterization measurements show that the actuator can achieve a rotational angle of 3 degrees with an applied voltage of 130 V. A resonance frequency of similar to 246 Hz for a mirror size of 2 mm x 100 mu m x 1 mm was determined by optical characterization; this closely matches with the simulation results and the analytical model. [2014-0318]