Fabrication of self-standing thin resin film with small through holes by low temperature nanoimprint process
Fabrication of self-standing thin resin film with small through holes by low temperature nanoimprint process
复制标题
低温纳米压印工艺制备小通孔自支撑薄树脂薄膜
DOI：
--
复制
发表时间：
2021
期刊：
影响因子：
--
通讯作者：
and Y. Hirai
中科院分区：
文献类型：
--
作者：
H. Kawata;S. Shimizu;H. Tanabe;M. Yasuda;H. Kikuta;and Y. Hirai
