Spectroscopic ellipsometry characterization of boron nitride films synthesized by a reactive plasma-assisted coating method
Spectroscopic ellipsometry characterization of boron nitride films synthesized by a reactive plasma-assisted coating method
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DOI：
10.1063/5.0077147
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发表时间：
2022-01
影响因子：
4
通讯作者：
T. Hamano;T. Matsuda;Y. Asamoto;M. Noma;S. Hasegawa;M. Yamashita;K. Urabe;K. Eriguchi
中科院分区：
文献类型：
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作者：
T. Hamano;T. Matsuda;Y. Asamoto;M. Noma;S. Hasegawa;M. Yamashita;K. Urabe;K. Eriguchi
