Electromigration Cu mass flow in Cu interconnections

Electromigration Cu mass flow in Cu interconnections
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DOI:
10.1016/j.tsf.2005.09.161
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发表时间:
2006-05
期刊:
影响因子:
2.1
通讯作者:
Chao-Kun Hu;D. Canaperi;Shyng-Tsong Chen;L. Gignac;S. Kaldor;M. Krishnan;S. G. Malhotra;E. Liniger;J. Lloyd;D. Rath;D. Restaino;R. Rosenberg;J. Rubino;S. Seo;A. Simon;S. Smith;W. Tseng
Chao-Kun Hu;D. Canaperi;Shyng-Tsong Chen;L. Gignac;S. Kaldor;M. Krishnan;S. G. Malhotra;E. Liniger;J. Lloyd;D. Rath;D. Restaino;R. Rosenberg;J. Rubino;S. Seo;A. Simon;S. Smith;W. Tseng
中科院分区:
材料科学3区
文献类型:
--
作者:
Chao-Kun Hu;D. Canaperi;Shyng-Tsong Chen;L. Gignac;S. Kaldor;M. Krishnan;S. G. Malhotra;E. Liniger;J. Lloyd;D. Rath;D. Restaino;R. Rosenberg;J. Rubino;S. Seo;A. Simon;S. Smith;W. Tseng

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