Stress state analysis of stress engineered BaTiO<sub>3</sub> thin film by LaNiO<sub>3</sub> bottom electrode
Stress state analysis of stress engineered BaTiO<sub>3</sub> thin film by LaNiO<sub>3</sub> bottom electrode
复制标题
LaNiO<sub>3</sub>底电极应力工程BaTiO<sub>3</sub>薄膜的应力状态分析
DOI:
10.2109/jcersj2.121.273
复制
发表时间:
2013
影响因子:
1.1
通讯作者:
Hisao Suzuki
中科院分区:
文献类型:
--
作者:
K. Murakoshi;K. Fukamachi;N. Sakamoto;T. Ohno;T. Kiguchi;T. Matsuda;T. Konno;N. Wakiya;Hisao Suzuki