Design of micro-scale highly expandable networks of polymer-based substrates for macro-scale applications
Design of micro-scale highly expandable networks of polymer-based substrates for macro-scale applications
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DOI：
10.1088/0964-1726/19/4/045013
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发表时间：
2010-04-01
影响因子：
4.1
通讯作者：
Chang, F-K
中科院分区：
文献类型：
--
作者：
Lanzara, G.;Feng, J.;Chang, F-K
研究人员设计了一个由聚合物基衬底上的导电微线连接的节点网络，该网络可以扩展到覆盖几个数量级的宏观集成区域。基板可以潜在地设计成承载纳米/微传感器/致动器和电子设备，以创建用于各种应用的功能网络。研究的主要重点是开发一种流程，以确保网络从微观尺度制造到宏观尺度部署的过渡是可控的，可靠的和稳定的，无故障的。提出的设计的关键概念是从基材上去除微观上不必要的材料，以创建一个可以拉伸和扩展到几个数量级的宏观尺度的基础设施网络。材料的减少是通过设计一个由可扩展的微线连接的数千个微节点的网络来实现的，这是在所有方向上执行网络均匀扩展的关键因素，允许节点的精确位置，最大限度地提高单位面积的聚合物膨胀，并且只允许节点的平移。节点数、网络的二维拉伸比和材料减量与可加工基板尺寸、完全扩展后的最终面积覆盖以及节点和导线的平面内面积有关。在本文中，我们证明了具有200 μ m直径节点和4 μ m宽导线的可扩展网络具有99.7%的材料减少和25 600%的二维拉伸比。5041微电极网络建立在直径100毫米的晶圆上，并在低应变水平下扩展到1米(2)的最终面积。扩展后的节点网络被集成到不同刚度的材料中，并被证明可以抵抗承载材料的弯曲和扭转。所提出的柔性、可膨胀聚合物设计是一种具有成本效益的方法，有可能在纳米/微观器件的工程设计和宏观尺度上的开发之间建立一座桥梁。特别是，这种方法可用于有线或无线传感器网络应用以及创新材料的实现。
An investigation was performed to design a network of nodes interconnected by conductive microwires in polymer-based substrates, which can be expanded to cover an area which is several orders of magnitude larger for macro-scale integration. The substrates can be potentially designed to host nano/micro-sensors/actuators and electronics to create a functional network for various applications. The major focus of the research is to develop a process to ensure that the network transition from a micro-scale fabrication to a macro-scale deployment is controllable, reliable and stable without failure. The key concept of the proposed design is to remove microscopically unnecessary materials from the substrate to create a network of infrastructures that can be stretched and expanded to a macro-scale size of several orders of magnitude. Material reduction is achieved by engineering a network of thousands of micronodes interconnected by extendable microwires, which are the key element to perform uniform expansions of the network in all directions, to allow precise location of the nodes, to maximize the polymer expansion per unit area and to allow translation only of the nodes. The number of nodes, the bidimensional stretching ratio of the network and the material reduction are linked to the processable substrate size, to the final area coverage upon full expansion and to the in-plane area of the nodes and wires. In this paper we demonstrate that an expandable network with 200 mu m diameter nodes and 4 mu m wide wires is characterized by a 99.7% material reduction and a 25 600% bidimensional stretching ratio. A 5041 micronode network was built on a 100 mm diameter wafer and was expanded to a final area of 1 m(2) at low strain levels. The expanded node network is integrated into materials of different rigidities and is proven to resist under bending and twisting of the hosting material. The proposed flexible, expandable polymer design is a cost-effective approach that has the potential to build a bridge between the engineering of the nano/microscopic devices and their exploitation on the macroscopic scale. In particular, this approach can be used for wired or wireless sensor network applications as well as for the realization of innovative materials.