Effect of step edge transition rates and anisotropy in simulations of epitaxial growth
Effect of step edge transition rates and anisotropy in simulations of epitaxial growth
复制标题
外延生长模拟中台阶边缘转变率和各向异性的影响
DOI：
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发表时间：
1991
期刊：
影响因子：
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通讯作者：
B. Dodson
中科院分区：
文献类型：
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作者：
E. Chason;B. Dodson
采用混合速率方程/Monte Carlo方法模拟了邻面外延生长过程。改变过渡率在步骤的边缘，改变脱离率从步骤的边缘和集群，并增加各向异性的扩散和掺入动力学在步骤的边缘和岛屿的表面形态的影响进行了研究。过渡速率对表面形态的影响进行了讨论的岛屿的成核和聚结的增长和步骤的传播之间的平衡。
The results of a hybrid rate equation/Monte Carlo simulation of epitaxial growth on vicinal surfaces is presented. The effect on surface morphology of changing transition rates at step edges, of changing detachment rates from step edges and clusters, and of adding anisotropy to the diffusion and incorporation kinetics at step edges and islands was studied. The effect of the transition rates on surface morphology are discussed in terms of a balance between growth by nucleation and coalescence of islands and by the propagation of steps.