Inductance Investigation of YBa 2 Cu 3 O 7−δ Nano-Slit SQUIDs Fabricated With a Focused Helium Ion Beam
Inductance Investigation of YBa 2 Cu 3 O 7−δ Nano-Slit SQUIDs Fabricated With a Focused Helium Ion Beam
复制标题
用聚焦氦离子束制造的 YBa 2 Cu 3 O 7âδ 纳米狭缝 SQUID 的电感研究
DOI：
10.1109/tasc.2019.2898692
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发表时间：
2019
影响因子：
1.8
通讯作者：
Cybart, Shane A.
中科院分区：
文献类型：
--
作者：
Li, Hao;Cho, Ethan Y.;Cai, Han;Wang, Yan-Ting;McCoy, Stephen J.;Cybart, Shane A.
聚焦氦离子束材料改性是制备YBa_2Cu_3O_（7-δ）（YBCO）约瑟夫森结和纳米尺度超导特征的理想方法。我们报道了YBCO纳米狭缝SQUID的制备和测量，并研究了SQUID主体和电极尺寸的缩放如何影响电学性能。利用单层25 nm厚的YBCO薄膜制备了16个不同宽度和长度的纳米狭缝SQUID。实验结果得到的片电感的估计值为~4 pH/□，穿透深度为~180 nm。电感的温度依赖性符合杂质散射模型，表明薄膜的TC为~82 K，0 K时几何电感与动力学电感之比为~0.8。这些结果为设计高性能、高TC的微型SQUID磁强计提供了坚实的基础。
Focused helium ion beam material modification is ideally suited for the fabrication of YBa2Cu3O7-δ (YBCO) Josephson junctions and superconducting feature sizes down to the nanoscale. We report the fabrication and measurement of YBCO nano-slit SQUIDs and study how scaling the dimensions of the SQUID body and electrodes influences the electrical properties. Sixteen nano-slit SQUIDs with different width and length were fabricated from a single-layer 25-nm-thick YBCO film. The experimental results yield an estimation of the sheet inductance to be ~4 pH/□ and a penetration depth of ~180 nm. The temperature dependence of the inductance agree well with an impurity scattering model, indicating that the TC of the film was ~82 K, and the ratio between geometric inductance and kinetic inductance at 0 K was ~0.8. These results provide solid basis for the design of high-performance, high-TC micro-SQUID magnetometers.