Fabrication and fundamental characterizations of tiled clones of single-crystal diamond with 1-inch size
Fabrication and fundamental characterizations of tiled clones of single-crystal diamond with 1-inch size
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DOI：
10.1016/j.diamond.2011.09.007
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发表时间：
2012-04-01
影响因子：
4.1
通讯作者：
Shikata, Shinichi
中科院分区：
文献类型：
--
作者：
Yamada, Hideaki;Chayahara, Akiyoshi;Shikata, Shinichi
我们开发了一种制造“瓦片克隆”的技术，这是一种新型的马赛克晶片。这项技术使用的是来自相同种子底物的“克隆”底物。将4到8个10 mm×10 mm的“克隆”基板连接起来，形成一个面积范围为20 mm×20 mm-20 mm×40 mm的大晶片，每个基片最多厚1 mm。这些克隆底物可以相对顺利地连接在一起，异常生长被抑制，组成克隆之间的边界几乎看不见。除了观察它们的横截面外，还测量了每个平铺无性系的拉曼光谱和X射线衍射。在远离边界的区域，X射线摇摆曲线的半高宽约为10-50弧秒。(C)2011爱思唯尔B.V.保留所有权利。
We have developed a technique to fabricate "tiled clones", a new type of mosaic wafers. This technique uses "cloned" substrates, which come from an identical seed substrate. Four to eight 10 mm x 10 mm "clone" substrates, each at most 1 mm thick, were connected to form one large wafer with a range of area of 20 mm x 20 mm-20 mm x 40 mm,. These clone substrates could be connected relatively smoothly, with abnormal growth being suppressed, and the boundaries among the constituent clones were almost invisible. In addition to observation of their cross sections, Raman spectra and X-ray diffraction was measured for each of these tiled clones. FWHM of the X-ray rocking curve was around 10-50 arcsec in the areas away from the boundaries. (C) 2011 Elsevier B.V. All rights reserved.