Design, fabrication and vacuum operation characteristics of two-dimensional comb-drive micro-scanner
Design, fabrication and vacuum operation characteristics of two-dimensional comb-drive micro-scanner
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DOI：
10.1016/j.sna.2010.11.004
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发表时间：
2011-02-01
影响因子：
4.6
通讯作者：
Hane, Kazuhiro
中科院分区：
文献类型：
--
作者：
Hoang Manh Chu;Hane, Kazuhiro
我们介绍了在真空中操作的二维微机械梳状驱动扫描仪的设计、制造和特性。该扫描仪可以使用倾斜静电梳状驱动器和由绝缘体上硅晶圆制成的硅导电 V 形扭转铰链在两个正交轴上驱动。内镜和万向架的谐振频率分别为40 kHz和162 Hz。谐振频率比为247。在1 Pa真空中，工作电压为12和10 V时，内镜和万向架的光学扫描角度分别为11.5度和14度。这些驱动电压分别比大气中的驱动电压小约 21 倍和 3 倍。还通过实验研究了内镜和万向架的品质因数对压力的依赖性，并与基于空气摩擦模型的理论计算进行了比较。 (C) 2010 Elsevier B.V. 保留所有权利。
We present design, fabrication, and characteristics of two-dimensional micro-machined comb-drive scanner to operate in vacuum. The scanner can be actuated in two orthogonal axes using the slanted electrostatic comb-drive and silicon conductive V-shaped torsion hinges fabricated from a silicon-on-insulator wafer. The resonant frequencies of the inner mirror and the gimbal frame are 40 kHz and 162 Hz, respectively. The resonant frequency ratio is 247. The optical scanning angles for the inner mirror and the gimbal frame are 11.5 degrees and 14 degrees at the operation voltages of 12 and 10 V in 1 Pa vacuum, respectively. These driving voltages are smaller by the factors of about 21 and 3 than those in atmosphere, respectively. The dependence of quality factor on pressure for the inner mirror and the gimbal frame is also experimentally investigated and compared with the theoretical calculation based on air-friction models. (C) 2010 Elsevier B.V. All rights reserved.