Innovative method to produce large-area freestanding functional ceramic foils
Innovative method to produce large-area freestanding functional ceramic foils
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DOI：
10.1016/j.jeurceramsoc.2018.03.051
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发表时间：
2018-03
影响因子：
5.7
通讯作者：
G. Leighton;P. Jones;Quentin Lonne;R. Dorey;F. Giuliano
中科院分区：
文献类型：
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作者：
G. Leighton;P. Jones;Quentin Lonne;R. Dorey;F. Giuliano
使用厚膜和薄膜代替大块功能材料在柔性电子和元件小型化领域具有巨大的优势。本文报道了一种低成本生长和释放大面积、微尺度厚度、独立式、功能性陶瓷箔的方法。该方法采用氯化钠蒸发到硅片衬底作为牺牲层，在此基础上，在710 °C的最高温度下生长功能钛酸铅锆酸盐陶瓷膜，以验证该方法。然后通过牺牲的氯化钠在水中的溶解释放出独立的功能箔，并且具有集成到低热稳定性印刷电路和柔性基板中的潜力。通过预退火处理，优化了氯化钠层的表面质量和与衬底晶圆的结合强度。
Using thick and thin films instead of bulk functional materials presents tremendous advantages in the field of flexible electronics and component miniaturization. Here, a low-cost method to grow and release large-area, microscale thickness, freestanding, functional, ceramic foils is reported. It uses evaporation of sodium chloride to silicon wafer substrates as sacrificial layers, upon which functional lead titanate zirconate ceramic films are grown at 710 °C maximum temperature to validate the method. The freestanding, functional foils are then released by dissolution of the sacrificial sodium chloride in water and have the potential to be integrated into low-thermal stability printed circuits and flexible substrates. The optimization of the sodium chloride layer surface quality and bonding strength with the underlying wafer is achieved thanks to pre-annealing treatment.