Development of accurate characterization technique of electrical properties in Ge1-xSnx-based group-IV epitaxial layers
Development of accurate characterization technique of electrical properties in Ge1-xSnx-based group-IV epitaxial layers
复制标题
Ge1-xSnx 基 IV 族外延层电性能精确表征技术的发展
DOI:
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发表时间:
2023
期刊:
影响因子:
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通讯作者:
and O. Nakatsuka
中科院分区:
文献类型:
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作者:
T. Mori;S. Shibayama;K. Nishizawa;M. Sakashita;M. Kurosawa;and O. Nakatsuka