Profile measurement of high aspect ratio micro structures using a tungsten carbide micro cantilever coated with PZT thin films
Profile measurement of high aspect ratio micro structures using a tungsten carbide micro cantilever coated with PZT thin films
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使用涂有 PZT 薄膜的碳化钨微悬臂梁进行高纵横比微结构的轮廓测量
DOI：
10.1109/memsys.2000.838519
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发表时间：
2000
期刊：
影响因子：
--
通讯作者：
S. Aoki
中科院分区：
文献类型：
--
作者：
M. Yamamoto;I. Kanno;S. Aoki
提出了一种用于高深宽比微结构无损检测的新型轮廓测量探头。该探头由碳化钨超硬合金(WC)制成，采用微细电火花加工。将PZT薄膜作为集成应变传感器涂覆在探头上。研制了配备该探头的专用测量机，对微小孔和齿轮进行了观察。在这些观察中，我们获得了样本详细形状的非常清晰的图像，这证明了该系统对危害评估的有效性。
A new profile measurement probe for non-destructive evaluation of high aspect ratio micro structure (HARMS) is proposed. The probe is made of tungsten carbide super hard alloy (WC) and machined by micro EDM. PZT thin films are coated on the probe as an integrated strain sensor. Dedicated measurement machine equipped with this probe is developed and we observed micro holes and gears. In these observations, we obtained very clear images of the sample's detailed shapes, which demonstrate the system's validation for HARMS evaluation.