Fabrication of Microfluidic Tesla Valve Employing Femtosecond Bursts.
Fabrication of Microfluidic Tesla Valve Employing Femtosecond Bursts.
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DOI：
10.3390/mi13081180
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发表时间：
2022-07-26
期刊：
影响因子：
3.4
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中科院分区：
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微流体领域的扩展要求不断改进用于生产此类系统的技术。飞秒激光直写（DLW）是一种应用越来越广泛的方法。DLW的减法模型允许以极其简单且具有成本效益的方式经由烧蚀直接产生微流体通道。然而，当使用直接fs烧蚀时，通道表面粗糙度始终是一个问题，因为它通常产生几µm范围内的RMS值。一个解决方案，以改善它是使用fs突发。因此，在这项工作中，我们展示了如何优化fs突发模式烧蚀，以在玻璃通道制造中实现亚微米的表面粗糙度。这是在不影响生产吞吐量的情况下完成的。此外，我们表明，一个简单的和具有成本效益的通道密封方法的热粘合可以采用。总之，它允许生产功能特斯拉阀，这是测试。讨论了所展示的能力。
Expansion of the microfluidics field dictates the necessity to constantly improve technologies used to produce such systems. One of the approaches which are used more and more is femtosecond (fs) direct laser writing (DLW). The subtractive model of DLW allows for directly producing microfluidic channels via ablation in an extremely simple and cost-effective manner. However, channel surface roughens are always a concern when direct fs ablation is used, as it normally yields an RMS value in the range of a few µm. One solution to improve it is the usage of fs bursts. Thus, in this work, we show how fs burst mode ablation can be optimized to achieve sub-µm surface roughness in glass channel fabrication. It is done without compromising on manufacturing throughput. Furthermore, we show that a simple and cost-effective channel sealing methodology of thermal bonding can be employed. Together, it allows for production functional Tesla valves, which are tested. Demonstrated capabilities are discussed.