Precise measurement of micro bubble resonator thickness by internal aerostatic pressure sensing
Precise measurement of micro bubble resonator thickness by internal aerostatic pressure sensing
复制标题
通过内部空气静压传感精确测量微泡谐振器厚度
DOI：
10.1364/oe.24.020855
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发表时间：
2016-09-05
期刊：
影响因子：
3.8
通讯作者：
Xu, Lei
中科院分区：
文献类型：
--
作者：
Lu, Qijing;Liao, Jie;Xu, Lei
我们开发了一种新的、简单的、非破坏性的方法，通过使用内部空气静压传感来精确测量薄壁微气泡谐振器（MBR）的厚度。气泡壁厚为2μm时测量误差为1%。该方法适用于薄壁和厚壁MBR，测量精度高。 (C) 2016年美国光学学会
We develop a new, simple and non-destructive method to precisely measure the thickness of thin wall micro bubble resonators (MBRs) by using internal aerostatic pressure sensing. Measurement error of 1% at a bubble wall thickness of 2 mu m is achieved. This method is applicable to both thin wall and thick wall MBR with high measurement accuracy. (C) 2016 Optical Society of America