Tetsuo Endoh: "A quantitative analysis of stress-induced leakage currents and extraction of trap properties in 6.8 nm ultrathin silicon dioxide films"JOURNAL OF APPLIED PHYSICS. 86 No.4. 2095-2099 (1999)

Tetsuo Endoh: "A quantitative analysis of stress-induced leakage currents and extraction of trap properties in 6.8 nm ultrathin silicon dioxide films"JOURNAL OF APPLIED PHYSICS. 86 No.4. 2095-2099 (1999)
复制标题

Tetsuo Endoh:“对 6.8 nm 超薄二氧化硅薄膜中应力引起的漏电流进行定量分析并提取陷阱特性”《应用物理学杂志》。

DOI:
--
复制
发表时间:
--
期刊:
影响因子:
--
通讯作者:
--
中科院分区:
--
文献类型:
--
作者:

文献摘要

相似文献