Irradiation nonuniformity due to imperfections of laser beams
Irradiation nonuniformity due to imperfections of laser beams
复制标题
由于激光束缺陷造成的照射不均匀性
DOI：
10.1063/1.354869
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发表时间：
1993
影响因子：
3.2
通讯作者：
H. Azechi
中科院分区：
文献类型：
--
作者：
M. Murakami;K. Nishihara;H. Azechi
基于Skupsky的轴对称模型[S. Skupsky和K. Lee，J.Appl.Phys.54，3662（1983）]。这些不均匀性可以通过减少缺陷σPΩ或增加激光束的数量NB来改善：恶化的辐照均匀性与σPΩ/Δ NB成正比。高辐照均匀性[≤1%均方根（rms）]的这些缺陷标准随后以NB表示。该模型进一步扩展到治疗一般的非对称光束模式。波束方向图的优化也是一个中心问题。
Intractable low‐mode nonuniformities caused by power imbalance or pointing error of beams are studied quasi‐analytically based on Skupsky’s axially symmetric model [S. Skupsky and K. Lee, J. Appl. Phys. 54, 3662 (1983)]. These nonuniformities can be improved by decreasing the imperfections σPΩ, or by increasing the number of laser beams NB: deteriorated irradiation uniformity is shown to be proportional to σPΩ/√NB. Criteria of these imperfections for high irradiation uniformity [≤1% root‐mean square (rms)] are then presented in terms of NB. The model is further extended to treat general asymmetric beam patterns. Optimization of beam pattern is also a central issue.