Fabrication of antireflection-structured surface using vertical nanowires as an initial structure
Fabrication of antireflection-structured surface using vertical nanowires as an initial structure
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DOI：
10.1116/1.3467506
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发表时间：
2010-09-01
影响因子：
1.4
通讯作者：
Nakao, Masayuki
中科院分区：
文献类型：
--
作者：
Nagato, Keisuke;Moritani, Hiroki;Nakao, Masayuki
以垂直合成的氧化铁纳米线为初始结构，制备了一种减反射结构。只需在空气中对铁薄膜进行简单的退火处理，就可以合成氧化铁纳米线。作者提出了一种将这些纳米线转化为锥形阵列的方法：在纳米线上沉积一层额外的薄铬膜，然后通过反应离子刻蚀进行刻蚀。由于铬的再沉积，垂直纳米线成功地转变为锥形结构。这种减反射纳米结构通过热纳米压印被复制到聚合物表面，复制的表面在所有可见波长都表现出低反射率。(C)2010年美国真空协会。[DOI：10.1116/1.3467506]
An antireflection structure was fabricated using vertically synthesized iron oxide nanowires as an initial structure. Iron oxide nanowires can be synthesized by simply annealing a thin Fe film in air. The authors propose a process for transforming these nanowires into an array of cone: An additional thin Cr film is deposited onto the nanowires and then etched by reactive ion etching. As a result of the redeposition of Cr, the vertical nanowires were successfully transformed into conical structures. This antireflection nanostructure is replicated onto a polymer surface by thermal nanoimprinting, and the replicated surface exhibited low reflectivity at all visible wavelengths. (C) 2010 American Vacuum Society. [DOI:10.1116/1.3467506]