Reduced coercive field in epitaxial thin film of ferroelectric wurtzite Al0.7Sc0.3N
Reduced coercive field in epitaxial thin film of ferroelectric wurtzite Al0.7Sc0.3N
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DOI：
10.1063/5.0043613
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发表时间：
2021-04-19
影响因子：
4
通讯作者：
Brennecka, Geoff L.
中科院分区：
文献类型：
--
作者：
Yazawa, Keisuke;Drury, Daniel;Brennecka, Geoff L.
研究了具有明显极化-电场滞后特性的外延纤锌矿铁电薄膜。在W/c-蓝宝石衬底上生长的Al0.7Sc0.3N外延薄膜的矫顽场比在铂/钛氧化物/二氧化硅/硅衬底上的普通纤维织构薄膜小0.4+/-0.3 mV cm(-1)(8%)，这归因于外延薄膜的c轴晶格参数减小了0.01±-0.007埃。矫顽场的应变和降低很可能源于外延应变，而不是热膨胀系数的失配。这些结果为进一步利用外延失配应变降低纤锌矿铁电材料的矫顽场提供了理论依据。
Epitaxial ferroelectric wurtzite films exhibiting clear polarization-electric field hysteresis behavior are presented. The coercive field of this epitaxial Al0.7Sc0.3N film on the W/c-sapphire substrate is 0.4 +/- 0.3MV cm(-1) (8%) smaller than that of a conventional fiber textured film on a Pt/TiOx/SiO2/Si substrate, attributed to the 0.01 +/- 0.007 angstrom smaller c-axis lattice parameter in the epitaxial film. The strain and decrease in the coercive field most likely originate from epitaxial strain rather than the mismatch in the thermal coefficient of expansion. These results provide insight for further coercive field reduction of wurtzite ferroelectrics using epitaxial mismatch strain.