Laser terahertz emission microscope
Laser terahertz emission microscope
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DOI：
10.1109/jproc.2007.898829
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发表时间：
2007-08-01
影响因子：
20.6
通讯作者：
Tonouchi, Masayoshi
中科院分区：
文献类型：
--
作者：
Murakami, Hironaru;Uchida, Naotsugu;Tonouchi, Masayoshi
综述了激光太赫兹（THz）发射显微镜（LTEM）系统的发展。飞秒激光可以激发来自各种电子材料的THz波发射，例如半导体、高温超导体、锰氧化物、多铁氧化物等，由于超快电流调制。将主题限制在半导体上，电流调制是通过由于在激光照射点处的局部电场的外部或内在感应而引起的光激发载流子的加速或减速来实现的。因此，LTEM具有在没有任何接触或损坏的情况下可视化局部电场分布和光响应的潜力。我们已经构建了具有透射或反射模式的原型自由空间型和扫描光纤探针（SFP）型LTEM系统。SFP-LTEM的系统性能与原型系统相比有了很大的提高。SFP-LTEM系统的空间分辨率具有小于3gm的最小空间分辨率，其由激光束直径限定。紧凑的SFP-LTEM系统，特别是反射系统，具有用于广泛应用以及各种材料的潜力。在这篇综述文章中，我们介绍了LTEM系统的细节以及在集成电路中电场分布和高温超导体中超导电流分布评估中的应用实例。
Developments of laser terahertz (THz) emission microscope (LTEM) systems are reviewed. Ferntosecond lasers can excite the THz wave emission from various electronic materials, such as semiconductors, high-temperature superconductors, manganites, multiferroic oxides, etc., due to ultrafast current modulation. Limiting the topic to semiconductors, the current modulation is realized by acceleration or deceleration of photoexcited carriers due to the local electric field extrinsically or intrinsically induced at the laser illumination spot. Thus, LTEM has a potential to, visualize the local electric field distribution and photoresponse without any contacts or damages. we have ever constructed prototype free-space type and scanning fiber-probe (SFP) type LTEM systems with transmission or reflection mode. The system performance of the SFP-LTEM has been greatly improved compared with that for the prototype one. The spatial resolution of the SFP-LTEM system has a minimum spatial resolution less than 3 gm, which is defined by the laser beam diameter. The compact SFP-LTEM system, in particular the reflection system, has the potential to be utilized for wide applications as well as various materials. in this review paper, we introduce the details of the LTEM systems and example applications for the evaluation of electric field distribution in integrated circuits and supercurrent distribution in high-temperature superconductors.