Improved collection efficiency for spectrally encoded imaging using 4f configuration
Improved collection efficiency for spectrally encoded imaging using 4f configuration
复制标题
使用 4f 配置提高光谱编码成像的收集效率
DOI：
10.1016/j.optlastec.2020.106611
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发表时间：
2021-03-01
影响因子：
5
通讯作者：
Yang，Lei
中科院分区：
文献类型：
--
作者：
Zhu，Qian;Wang，Leran;Yang，Lei
光谱编码成像(SEI)提供了有价值的样品结构信息，是研究科学技术应用中各种现象不可缺少的工具。在该方法中，宽带光束入射到衍射光栅上，然后聚焦到照明样品上，采集多个空间点数据。SEI中的一个主要挑战是如何将入射光分散到多个波长，并有效地将它们会聚到一个小直径的接收器中，也称为波长到空间映射。在这里，我们提出并演示了一种紧凑、高性能的扫描电子显微镜系统，结合1.5μm频段的4f配置，极大地提高了波长到空间映射过程的收集效率。成功地进行了高空间分辨率SEI方案的概念验证实验，通过4f系统将波长到空间映射的总体收集效率提高到70%。
Spectrally encoded imaging (SEI), providing valuable structural information of the specimen, is an indispensable tool to study on diverse phenomenon in scientific and technological applications. In this method, a broadband light beam was incident on a diffraction grating, and then focused on an illuminating sample to collect multiple spatial point data. A major challenge in SEI is implementation of dispersing the incident light to multiple wavelengths and efficiently converging them into a small-diameter receiver, also referred as wavelength-to-space mapping. Here, we propose and demonstrate a compact and high-performance SEI system combining with 4f configuration in 1.5 μ m band, which immensely improves the collection efficiency of wavelength-to-space mapping procedure. Proof-of-concept experiment with a high spatial resolution SEI scheme is successfully performed, and the overall collection efficiency of wavelength-to-space mapping increases to 70% through 4f system.