Microscopic TV shearography for characterization of microsystems.
Microscopic TV shearography for characterization of microsystems.
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DOI：
10.1364/ol.34.001612
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发表时间：
2009-05
期刊：
影响因子：
3.6
通讯作者：
U. Paul Kumar;M. P. Kothiyal;N. K. Mohan
中科院分区：
文献类型：
--
作者：
U. Paul Kumar;M. P. Kothiyal;N. K. Mohan
我们通过测量相对较大的平面外变形下的斜率，展示了一种用于表征微系统的显微电视剪切成像配置。在光学装置中，长距离变焦成像系统与传统的迈克尔逊剪切干涉仪相结合。给出了微电子机械系统压力传感器在外压载荷作用下的实验结果。
We demonstrate a microscopic TV shearographic configuration for characterization of microsystems by measuring the slope under relatively large out-of-plane deformation. In the optical arrangement, a long working distance zoom imaging system is combined with a conventional Michelson shear interferometer. The experimental results on a microelectromechanical system pressure sensor subjected to external pressure load are presented.