Nanoscale phase separation in epitaxial Cr-Mo and Cr-V alloy thin films studied using atom probe tomography: Comparison of experiments and simulation
Nanoscale phase separation in epitaxial Cr-Mo and Cr-V alloy thin films studied using atom probe tomography: Comparison of experiments and simulation
复制标题
使用原子探针断层扫描研究外延 Cr-Mo 和 Cr-V 合金薄膜的纳米级相分离：实验与模拟的比较
DOI：
10.1063/1.4901465
复制
发表时间：
2014
影响因子：
3.2
通讯作者：
R. Kurtz
中科院分区：
文献类型：
--
作者：
A. Devaraj;T. Kaspar;Sathvik Ramanan;Sarita K. Walvekar;M. Bowden;V. Shutthanandan;R. Kurtz
利用分子束外延(MBE)在单晶氧化物衬底上沉积合金薄膜所产生的量身定制的金属合金薄膜-氧化物界面可用于详细研究界面结构的辐照损伤响应。然而，分子束外延生长的合金薄膜中纳米级相分离的存在会影响金属-氧化物的界面结构。由于这种相分离的纳米尺度的微区尺寸，用传统的技术进行表征是非常具有挑战性的。为此，利用激光辅助原子探针层析技术(APT)研究了分子束外延生长的Cr0.61Mo0.39、Cr0.77Mo0.23和Cr0.32V0.68合金薄膜的相分离行为。对实验数据进行了统计分析，即频率分布分析和皮尔逊系数分析，并与在已知相分离程度的模拟APT数据集上进行的类似分析进行了比较。因此，在铬-钼薄膜中存在相分离，甚至是相分离。
Tailored metal alloy thin film-oxide interfaces generated using molecular beam epitaxy (MBE) deposition of alloy thin films on a single crystalline oxide substrate can be used for detailed studies of irradiation damage response on the interface structure. However, the presence of nanoscale phase separation in the MBE grown alloy thin films can impact the metal-oxide interface structure. Due to nanoscale domain size of such phase separation, it is very challenging to characterize by conventional techniques. Therefore, laser assisted atom probe tomography (APT) was utilized to study the phase separation in epitaxial Cr0.61Mo0.39, Cr0.77Mo0.23, and Cr0.32V0.68 alloy thin films grown by MBE on MgO(001) single crystal substrates. Statistical analysis, namely frequency distribution analysis and Pearson coefficient analysis of experimental data was compared with similar analyses conducted on simulated APT datasets with known extent of phase separation. Thus, the presence of phase separation in Cr-Mo films, even ...