vi INFORMATION FOR CONTRIBUTORS ix GENERAL EDITORIAL POLICIES xi EDITORIAL: Submitting Electronic Graphics Files OPTICS 1 Technique for integration of vertical cavity lasers and resonant photodetectors
vi INFORMATION FOR CONTRIBUTORS ix GENERAL EDITORIAL POLICIES xi EDITORIAL: Submitting Electronic Graphics Files OPTICS 1 Technique for integration of vertical cavity lasers and resonant photodetectors
复制标题
vi 投稿者信息 ix 一般编辑政策 xi 编辑：提交电子图形文件 OPTICS 1 垂直腔激光器和谐振光电探测器集成技术
DOI：
10.1063/1.122951
复制
发表时间：
1998
期刊：
影响因子：
--
通讯作者：
M. Umeno
中科院分区：
文献类型：
--
作者：
D. Louderback;E. Hegblom;J. Ko;L. Coldren;K. Meerholz;Yessica De Nardin;Ray A. Bittner;M. A. Bopp;Yiwei Jia;G. Haran;E. Morlino;R. Hochstrasser;H. Inoue;H. Sakaguchi;T. Nagamura;J. Khurgin;B. Saif;B. Seery;E. Delre;M. Tamburrini;M. Segev;E. Refaeli;A. Agranat;A. Bond;P. Dapkus;G. Zhao;H. Ishikawa;Guolin Yu;T. Egawa;J. Watanabe;T. Soga;T. Jimbo;M. Umeno
我们展示了一种设计，允许制造基板输入/输出谐振腔光电探测器和垂直腔激光器（VCL）在同一基板上没有再生长。通过选择性地氧化底部反射镜中的几个层，将用作检测器的输入反射镜的80%反射率反射镜转换为99.3%反射率反射镜，从而允许从相同的外延材料制造VCL。由于这两个反射率是不相关的，检测器和VCL可以单独设计。尽管在氧化层中折射率从λ 3变化到λ 1.6，但是该结构可以被设计为对于检测器和VCL具有几乎相同的谐振波长。使用这种设计策略，我们已经成功地制造了高性能的谐振光电探测器和VCL从相同的外延材料。光电探测器的吸收率为56%，光学带宽为5.9 nm，与理论符合得很好。小直径、单模VCL具有阈值C…
We demonstrate a design that allows fabrication of substrate input/output resonant-cavity photodetectors and vertical cavity lasers (VCLs) on the same substrate without regrowth. By selectively oxidizing a few layers in the bottom mirror the as-grown 80% reflectivity mirror, used as the input mirror for the detector, is converted to a 99.3% reflectivity mirror allowing fabrication of VCLs from the same epitaxial material. Since these two reflectivities are uncorrelated, the detectors and VCLs can be individually designed. Despite the change in refractive index from ∼3 to ∼1.6 in the oxidized layers, the structure can be designed to have nearly the same resonance wavelength for both the detectors and VCLs. Using this design strategy, we have successfully fabricated high-performance resonant photodetectors and VCLs from the same epitaxial material. The photodetectors have an absorption of 56% and an optical bandwidth of 5.9 nm, in good agreement with theory. Small diameter, single-mode VCLs have threshold c...