Simulation of generation of bulk acoustic waves by interdigital transducers
Simulation of generation of bulk acoustic waves by interdigital transducers
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DOI：
10.1109/ultsym.2001.991854
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发表时间：
2001-10
期刊：
影响因子：
--
通讯作者：
M. Deng
中科院分区：
文献类型：
--
作者：
M. Deng
衬底中的叉指换能器（IDT）将沿着表面声波产生体声波（BAW）。鉴于叉指换能器产生体声波的效应可用于制作高频体声波换能器，本文讨论了叉指换能器产生体声波的关系。采用叉指换能器产生体声波的电阻密度来描述给定晶体取向的体声波产生效率。模拟结果表明，对于某些晶体取向，存在最有效的体声波生成。给出了纯体声波模的产生方向。此外，还讨论了用叉指换能器制作高频体声波换能器的可能性。
Interdigital transducers (IDTs) in a substrate will generate bulk acoustic waves (BAWs) along with the surface acoustic waves. Whereas the effect of BAW generation by IDTs may be employed to fabricate BAW transducers working at high frequency, the relationships of BAW generation by IDTs are discussed in this article. The resistance densities of BAW generation by IDTs are employed to describe the efficiency of BAW generation for given crystal orientations. The results of simulation show that for some crystal orientations there are the most efficient BAW generations. The generation directions of pure BAW modes are illustrated. Moreover, the possibility of fabricating HF BAW transducers by IDTs is discussed.