A multilayer thick-film PZT actuator for MEMs applications
A multilayer thick-film PZT actuator for MEMs applications
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DOI：
10.1016/j.sna.2006.06.006
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发表时间：
2006-11-08
影响因子：
4.6
通讯作者：
Ding, J.
中科院分区：
文献类型：
--
作者：
Harris, N. R.;Hill, M.;Ding, J.
本文介绍了一种技术，用于取代传统的键合体PZT换能器，通常用于MEMS器件，与丝网印刷等效。以前，从丝网印刷PZT可获得的压电活性已经显著低于体材料，但是材料成分和器件结构的最近发展已经允许丝网印刷结构递送与体器件等效的功率。采用多层丝网印刷技术设计了一种用于超声波流通式分离器的致动器，并报道了其成功应用。(c)2006 Elsevier B.V.保留所有权利。
This paper describes a technique for replacing the conventional bonded bulk PZT transducer, commonly used in MEMS devices, with a screen printed equivalent. Previously, the piezoelectric activity available from screen printed PZT has been considerably lower than the bulk material, but recent developments in material composition and device structure have allowed screen printed structures to deliver powers equivalent to bulk devices. An actuator using the multilayer screen printed technique was designed for use in an ultrasonic flow-through separator, and its successful use is reported. (c) 2006 Elsevier B.V. All rights reserved.