High-space resolution imaging plate analysis of extreme ultraviolet (EUV) light from tin laser-produced plasmas
High-space resolution imaging plate analysis of extreme ultraviolet (EUV) light from tin laser-produced plasmas
复制标题
DOI：
10.1063/1.4978526
复制
发表时间：
2017-03-01
影响因子：
1.6
通讯作者：
Nagai, Keiji
中科院分区：
文献类型：
--
作者：
Musgrave, Christopher S. A.;Murakami, Takehiro;Nagai, Keiji
随着通过极紫外光刻的大批量制造能力的出现，需要不断改进光源设计和成本效率。目前，光强度和转换效率（CE）的测量是通过电荷耦合器件、法拉第杯等获得的，但也可以通过磷光成像板（IP）（BaFBr：Eu）获得。IP对光和高能量物种敏感，这是研究激光产生等离子体（LPP）的极紫外（EUV）光的理想选择。在这项工作中，我们使用IP来观察大角度分布（10度-90度）。我们通过高能激光（1064 nm Nd：YAG，10（10）和10（11）W/cm（2））烧蚀锡靶以产生EUV光。IP中的铕离子由于暴露于EUV光和高能物质而被捕获在更高的能量状态。光强度是角度依赖性的;因此IP的激发取决于角度，并且因此关于LPP的高度信息。我们获得了高空间分辨率（345 μ m，0.2度）的角分布和掠射光谱仪（5-20 nm光栅）的数据，同时在不同的目标IP距离（103毫米和200毫米）。还比较了两种激光系统和IP类型（BAS-TR和BAS-SR）。使用IP数据的余弦拟合值计算13.5 nm 2%带宽下的CE为1.6%（SD +/- 0.2）。最后，公开了IP的实际评估和损坏问题。(C)2017年作者。
With the advent of high volume manufacturing capabilities by extreme ultraviolet lithography, constant improvements in light source design and cost-efficiency are required. Currently, light intensity and conversion efficiency (CE) measurments are obtained by charged couple devices, faraday cups etc, but also phoshpor imaging plates (IPs) (BaFBr: Eu). IPs are sensitive to light and high-energy species, which is ideal for studying extreme ultraviolet (EUV) light from laser produced plasmas (LPPs). In this work, we used IPs to observe a large angular distribution (10 degrees-90 degrees). We ablated a tin target by high-energy lasers (1064 nm Nd:YAG, 10(10) and 10(11) W/cm(2)) to generate the EUV light. The europium ions in the IP were trapped in a higher energy state from exposure to EUV light and high-energy species. The light intensity was angular dependent; therefore excitation of the IP depends on the angle, and so highly informative about the LPP. We obtained high-space resolution (345 mu m, 0.2 degrees) angular distribution and grazing spectrometer (5-20 nm grate) data simultaneously at different target to IP distances (103 mm and 200 mm). Two laser systems and IP types (BAS-TR and BAS-SR) were also compared. The cosine fitting values from the IP data were used to calculate the CE to be 1.6% (SD +/- 0.2) at 13.5 nm 2% bandwidth. Finally, a practical assessment of IPs and a damage issue are disclosed. (C) 2017 Author(s).