MIM Structure With Inverted M-Type Cavity for Sensing Applications

MIM Structure With Inverted M-Type Cavity for Sensing Applications
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用于传感应用的具有倒置 M 型腔的 MIM 结构

DOI:
10.1109/jsen.2020.3044901
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发表时间:
2021-03
影响因子:
4.3
通讯作者:
Ertian Hua
Ertian Hua
中科院分区:
综合性期刊2区
文献类型:
--
作者:
Shubin Yan;Xiaoyu Yang;Daijing Xu;Hao Su;Xiushan Wu;Ertian Hua

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在此,提出了一种包括金属-绝缘体-金属(MIM)波导和倒置M型腔(IMTC)的高灵敏度多功能纳米传感器。由于不同光路之间的相互作用而产生法诺共振。提出了两种对比结构,以说明适当的干扰面积导致更好的传播特性。研究了几何参数对传感特性的影响。四个衍生结构进行了研究,讨论提高灵敏度的主要因素。设计的结构可以检测温度和NaCl溶液浓度,灵敏度分别达到1.444 nm/°C和6.6 nm/%。所设计的结构也可以潜在地应用于其他纳米器件。
Herein, a high-sensitivity multifunctional nanosensor comprising a metal-insulator-metal (MIM) waveguide and an inverted M-type cavity (IMTC) is presented. Fano resonances are generated owing to the interactions between different light pathways. Two contrastive structures are proposed to illustrate that a proper interference area leads to better propagation characteristics. The influence of geometric parameters on sensing properties is studied. Four derived structures are investigated to discuss the main factor for improving sensitivity. The designed structure can detect temperature and NaCl solution concentration with sensitivities reaching 1.444 nm/°C and 6.6 nm/%, respectively. The designed structures can also potentially be applied to other nanoscale devices.
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