New design of a radio-frequency plasma torch
New design of a radio-frequency plasma torch
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DOI：
10.1007/bf00566379
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发表时间：
1981-03
影响因子：
3.6
通讯作者：
T. Yoshida;K. Nakagawa;T. Harada;K. Akashi
中科院分区：
文献类型：
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作者：
T. Yoshida;K. Nakagawa;T. Harada;K. Akashi
建立了一个用于预测射频等离子体炬二维流场和温度场的数值模型。这里采用的方法是基于Boulos的模型，除了电场和磁场方程的边界条件。计算已确认一种新的样品注入方法，这是能够完全蒸发耐火材料在高进料速率不干扰等离子体的稳定性。在新设计的炬，试剂径向注入到等离子体的最热的部分，通过石英毛细管之间的感应线圈对称设置。还进行了实验研究，以验证适当的功能的设计。这些结果提供了证据，我们的径向注射方法在这里开发的实际加工比传统的轴向注射方法更有效。
A numerical model has been developed for predicting the two-dimensional flow and temperature fields in a radio-frequency (rf) plasma torch. The method employed here is based on Boulos' model with the exception of the boundary conditions for the electric and magnetic field equations. Calculations have been made for the confirmation of a new sample injection method, which is capable of completely evaporating refractory materials at high feeding rates without interfering with the stability of the plasma. In the newly designed torch, the reagent is radially injected into the hottest part of the plasma through quartz capillary tubes set symmetrically between an inductor coil. Experimental investigations have also been performed for verifying the proper function of the design. These results provide evidence that our radial injection method developed here is more effective in practical processing than the conventional axial injection methods.