Multi-element model for the simulation of inductively coupled plasmas: Effects of helium addition to
Multi-element model for the simulation of inductively coupled plasmas: Effects of helium addition to
复制标题
用于模拟电感耦合等离子体的多元素模型:添加氦气对电感耦合等离子体的影响
DOI:
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发表时间:
2011
期刊:
影响因子:
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通讯作者:
A. Bogaerts
中科院分区:
文献类型:
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作者:
H. Lindner;A. Bogaerts