Iintegration of Angular Rate Sensor on Large Deflection Polymer-MEMS Mirror
Iintegration of Angular Rate Sensor on Large Deflection Polymer-MEMS Mirror
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大偏转聚合物-MEMS反射镜上角速率传感器的集成
DOI：
10.1109/omn.2013.6659063
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发表时间：
2013
期刊：
影响因子：
--
通讯作者：
and T. Suzuki
中科院分区：
文献类型：
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作者：
H. Yamashita;K. Terao;H. Takao;F. Shimokawa;F. Oohira;and T. Suzuki
聚合物-MEMS反射镜的驱动特性的可重复性通过环境和时间过程改变而转变。在这项研究中，我们提出了一种运动传感的方法，激光扫描稳定的聚合物MEMS反射镜的主动控制的目的。所提出的运动传感器是线圈型传感器，其通过电磁感应来感应电流，并且被单片集成在由电磁力驱动的反射镜上。由SU-8聚合物制成的反射镜偏转超过± 30度。在低电流下。应用锁相检测信号处理方法，得到了清晰的集成传感线圈感应电流，表明了聚合物MEMS反射镜振幅控制的可行性。
Repeatability of driving characteristics of a polymer-MEMS mirror are transitioned by an environment and time course change. In this study, we propose a method of motion sensing for the purpose of laser scan stable by the active control of a polymer-MEMS mirror. A proposed motion sensor is a coil-type sensor that induces the electric current by an electromagnetic induction and monolithically integrated on the mirror driving by the electromagnetic force. The fabricated mirror made of SU-8 polymer deflects over ±30deg. at low electric current. The measured current induced by the integrated sensor coil is clearly obtained by applying the lock-in detection for signal processing method, and it indicates that the feasibility of amplitude control of the polymer MEMS mirror.