Y.Sun & T.Miyasato.: "Jpn.J.Appl.Phys." Characterization of Stress in Porous Silicon Films Prepared by Reactive Hydrogen Plasma Sputtering Technique.34. L1248-L1250 (1995)

Y.Sun & T.Miyasato.: "Jpn.J.Appl.Phys." Characterization of Stress in Porous Silicon Films Prepared by Reactive Hydrogen Plasma Sputtering Technique.34. L1248-L1250 (1995)
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