Pump–probe studies of EUV and X-ray emission dynamics of laser-irradiated noble gas droplets
Pump–probe studies of EUV and X-ray emission dynamics of laser-irradiated noble gas droplets
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激光照射惰性气体液滴的 EUV 和 X 射线发射动力学的泵浦探针研究
DOI：
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发表时间：
2003
期刊：
影响因子：
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通讯作者：
H. Milchberg
中科院分区：
文献类型：
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作者：
E. Parra;S. Mcnaught;J. Fan;H. Milchberg
翻译后摘要：高强度100 ps激光脉冲与微米级惰性气体（氩和氪）液滴的相互作用的实验研究通过一系列的泵浦探测实验监测延迟依赖的X射线和极紫外（EUV）发射，并通过成像倍频探测光散射的相互作用区域。这种相互作用的时间尺度的理解是重要的优化下一代光刻，利用激光产生的等离子体（LPP）的EUV源。根据感兴趣的光谱区域，发射的类型，和液滴的特性，有效的发射寿命被发现从几百皮秒延长到长达几纳秒，与预期的等离子体膨胀，EUV激发，和复合发射时间尺度一致。
Abstract.The interaction of high intensity 100-ps laser pulses with micron-sized noble gas (argon and krypton) droplets is experimentally investigated via a series of pump–probe experiments monitoring the delay-dependent X-ray and extreme ultraviolet (EUV) emission, and by imaging frequency-doubled probe light scattered from the interaction region. An understanding of the time scales for this interaction is important for optimization of EUV sources for next-generation lithography that utilizes laser-produced plasmas (LPP). Depending on the spectral region of interest, the type of emission, and the droplet characteristics, the effective emission lifetime was found to extend from a few hundred picoseconds to as long as several nanoseconds, in agreement with the expected plasma expansion, EUV excitation, and recombination emission time scales.