Fabrication and Evaluation of Electret Condenser Sensors with Layered Microgaps for Ultrasonic Measurement of Natural Rubbers
Fabrication and Evaluation of Electret Condenser Sensors with Layered Microgaps for Ultrasonic Measurement of Natural Rubbers
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用于天然橡胶超声测量的层状微间隙驻极体电容传感器的制作和评估
DOI：
10.11395/jjsem.12.37
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发表时间：
2012
期刊：
影响因子：
--
通讯作者：
K. Kageyama
中科院分区：
文献类型：
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作者：
K. Kageyama
通过膜层压而不粘合形成的微间隙表现出高电击穿强度。与聚合物驻极体相比，极化PZT具有极高的极化。在这项研究中，驻极体电容传感器（FeECS）的薄膜层压和极化的PZT驻极体形成的微间隙制备。当用作软介质（天然橡胶、硅树脂和丙烯酸）的超声波探头时，检查所制备的样品的传输特性。在差距中叠层PFA和PPS薄膜，可以有效地抑制压电陶瓷片的共振。该衰减随着膜层压的数量而增加。在差距中薄膜间界面处添加BN团聚体，增加了透射超声波的信号强度，同时也衰减了共振振动。这种改善可能是由于在差距中膜之间的接触面积减小。一些FeECS样品显示出比压电样品更高的强度和更多的信号上升沿斜率，但强度的时间退化是明显的：信号的上升沿斜率在三天后下降了约40%。驻极体（PZT）中的放电可能引起时间劣化，从而需要改善铁电陶瓷的绝缘性。
Microgaps formed by film lamination without bonding exhibit high electric breakdown strength. Poled PZT has extremely high polarization compared to a polymer electret. For this study, electret condenser sensors (FeECSs) were prepared with microgaps formed by film lamination and a poled PZT electret. Transmission properties of the prepared samples were examined when used as ultrasonic probes for soft media (natural rubber, silicone, and acrylic). Lamination of PFA and PPS film in the gap attenuated the resonant vibration of the PZT disk. That attenuation increased concomitantly with the number of film laminations. Addition of BN agglomerates at the interface between films in the gap increased the signal intensity of transmitted ultrasonic waves as well as the attenuation of the resonant vibration. Such improvement might result from the decrease in the contact area between the films in the gap. Some FeECS samples showed higher intensity and more of a rising edge slope of the signal than the piezoelectric sample showed, but time-degradation of the intensity was apparent: the rising edge slope of the signal decreased by around 40% after three days. Discharge in the electret (PZT) might cause time degradation, thereby necessitating improvement of the insulation of the ferroelectric ceramics.