MEMS technology for timing and frequency control
MEMS technology for timing and frequency control
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DOI：
10.1109/freq.2005.1573895
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发表时间：
2005
期刊：
影响因子：
--
通讯作者：
C. Nguyen
中科院分区：
文献类型：
--
作者：
C. Nguyen
概述了使用微机电系统 (MEMS) 技术进行定时和频率控制。特别是，基于最近展示的振动片上微机械谐振器的微机械射频滤波器和参考振荡器，在 1.5 GHz 时 Q 值 >10,000，被描述为一种有吸引力的解决方案，可满足未来多频段无线设备预计所需的射频组件（例如滤波器）数量不断增加的需求。由于片上 Q 值如此之高，此类器件还可能实现定时和频率控制功能设计的范式转变，强调而不是抑制高 Q 值的优势（例如，由于尺寸和成本原因），从而增强鲁棒性并节省功耗。凭借更先进的 3D MEMS 技术，通过芯片级原子物理封装实现了更高的片上 Q 值，到目前为止，使用体积仅为 10 mm/sup 3/ 的原子单元实现了 Q 值 >10/sup 7/，仅消耗 5 mW 的功率，同时仍允许艾伦偏差在一小时内降至 10/sup -11/。
An overview on the use of microelectromechanical systems (MEMS) technologies for timing and frequency control is presented. In particular, micromechanical RF filters and reference oscillators based on recently demonstrated vibrating on-chip micromechanical resonators with Q's >10,000 at 1.5 GHz, are described as an attractive solution to the increasing count of RF components (e.g., filters) expected to be needed by future multi-band wireless devices. With Q's this high in on-chip abundance, such devices might also enable a paradigm-shift in the design of timing and frequency control functions, where the advantages of high-Q are emphasized, rather than suppressed (e.g., due to size and cost reasons), resulting in enhanced robustness and power savings. With even more aggressive 3D MEMS technologies, even higher on-chip Q's have been achieved via chip-scale atomic physics packages, which so far have achieved Q's >10/sup 7/ using atomic cells measuring only 10 mm/sup 3/ in volume, consuming just 5 mW of power, all while still allowing Allan deviations down to 10/sup -11/ at one hour.