Wei Gao, Tomohiko Yamada, Masaru Furukawa, Tomohisa Nakamura, and Satoshi Kiyono: "Precision nanometrology of large silicon wafers"Journal of Nanotechnology and Precision Engineering. in press. (2003)
Wei Gao, Tomohiko Yamada, Masaru Furukawa, Tomohisa Nakamura, and Satoshi Kiyono: "Precision nanometrology of large silicon wafers"Journal of Nanotechnology and Precision Engineering. in press. (2003)
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Wei Gau、Tomohiko Yamada、Masaru Furukawa、Tomohisa Nakamura 和 Satoshi Kiyono:《大硅片的精密纳米计量学》纳米技术与精密工程杂志。
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