Thickness measurements with electron energy loss spectroscopy
Thickness measurements with electron energy loss spectroscopy
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DOI：
10.1002/jemt.20597
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发表时间：
2008-08-01
影响因子：
2.5
通讯作者：
Furuya, K.
中科院分区：
文献类型：
--
作者：
Iakoubovskii, K.;Mitsuishi, K.;Furuya, K.
修正了用电子能量损失谱（EELS）测量厚度的方法。用Kramers-Kronig和法可以快速准确地确定绝对厚度值。使用对数比方法分析EELS数据更加容易，然而，该方法的绝对校准需要了解非弹性电子散射λ的平均自由程。后者已经在广泛的固体范围内进行了测量，并且揭示了类似于rho（-0.3）对质量密度的标度定律。EELS测量严重依赖于激发和收集角度。对这种依赖关系进行了实验和理论研究，并建立了一个有效的模型。
Measurements of thickness using electron energy loss spectroscopy (EELS) are revised. Absolute thickness values can be quickly and accurately determined with the Kramers-Kronig sum method. The EELS data analysis is even much easier with the log-ratio method, however, absolute calibration of this method requires knowledge of the mean free path of inelastic electron scattering lambda. The latter has been measured here in a wide range of solids and a scaling law lambda similar to rho(-0.3) versus mass density rho has been revealed. EELS measurements critically depend on the excitation and collection angles. This dependence has been studied experimentally and theoretically and an efficient model has been formulated.