Bending Strength of Borosilicate Glass Coated with Alumina and Silicon Carbide by RF Magnetron Sputtering
Bending Strength of Borosilicate Glass Coated with Alumina and Silicon Carbide by RF Magnetron Sputtering
复制标题
射频磁控溅射镀氧化铝和碳化硅硼硅酸盐玻璃的弯曲强度
DOI：
10.1299/jsmea.41.332
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发表时间：
1998
期刊：
影响因子：
--
通讯作者：
K. Hayashi
中科院分区：
文献类型：
--
作者：
T. Hoshide;A. Nebu;K. Hayashi
从溅射条件和靶材的不同对陶瓷镀膜玻璃抗弯强度的影响两个方面研究了陶瓷镀膜玻璃的抗弯强度。在这项工作中，硼硅酸盐玻璃涂覆氧化铝或碳化硅通过射频磁控溅射法在各种条件下。对涂层材料和玻璃基板进行了三点弯曲试验。与玻璃基板相比，涂层材料的强度有所提高。涂层材料的强度分散似乎与玻璃基材的强度分散相当或小于玻璃基材的强度分散。尽管整体氧化铝通常比整体碳化硅弱，但发现氧化铝涂覆材料的强度高于碳化硅涂覆材料的强度。这种趋势是由碳化硅涂层材料中产生的拉伸热应力解释的，其中衬底最初是预热的。
Bending strength of ceramics coated glass was investigated from two aspects, concerning effects of the sputtering condition and the difference of target material on the strength. In this work, a borosilicate glass was coated with an alumina or a silicon carbide by a radio-frequency magnetron sputtering method under various conditions. Three-point bending tests of coated materials and the glass substrate were carried out. The strength of coated material was improved compared with that of the glass substrate. The scatter in the strength of coated materials appeared to be comparable with of less than the strength scatter of the glass substrate. Although monolithic alumina is usually weaker than monolithic silicon carbide, the strength of alumina coated materials was found to be higher than that of silicon carbide coated materials. This tendency was explained by a tensile thermal stress generated in silicon carbide coated materials, in which substrates were initially pre-heated.