Controllable three dimensional deformation of platinum nanopillars by focused-ion-beam irradiation
Controllable three dimensional deformation of platinum nanopillars by focused-ion-beam irradiation
复制标题
聚焦离子束辐照铂纳米柱的可控三维变形
DOI：
10.1016/j.mee.2012.04.027
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发表时间：
2012-10-01
影响因子：
2.3
通讯作者：
Gu, Changzhi
中科院分区：
文献类型：
--
作者：
Cui, Ajuan;Li, Wuxia;Gu, Changzhi
自支撑纳米结构是构建三维（3D）纳米器件的基本要素。通过离子辐照使纳米柱弯曲可用于产生悬垂纳米结构。在本文中，我们报告的弯曲聚焦离子束（FIB）生长的铂纳米柱照射。结果表明，对于垂直于衬底的纳米柱，通过调整入射离子束与纳米柱的相对几何形状，可以获得所需的弯曲方向和形状。这种纳米结构可用于3D纳米器件构造。此外，离子辐照与优化的条件可以用来改善沉积的纳米柱的表面形貌。我们的研究结果表明，使用FIB弯曲独立纳米物体的方法可能有利于在3D纳米结构中构建互连，从而对选定的单个纳米物体进行性能研究。(C)2012 Elsevier B.V.保留所有权利。
Freestanding nanostructures are fundamental elements to construct three-dimensional (3D) nanodevices. The bending of nanopillars by ion irradiation can be used to produce overhanging nanostructures. In this paper, we report the bending of focused-ion-beam (FIB) grown platinum nanopillars by FIB irradiation. The results show that for nanopillars originally perpendicular to the substrate, by adjusting the relative geometry of the incident ion beam and the nanopillars, desired bending direction and shape can be achieved. Such nanostructures can be used for 3D nanodevice constructions. Besides, ion irradiation with optimized conditions can be used to improve the surface morphology of the as-deposited nanopillars. Our results suggest that the method of bending freestanding nanoobjects using FIB is likely to be advantageous to construct interconnects in 3D nanostructures towards the properties investigations of selected individual nanoobjects. (C) 2012 Elsevier B.V. All rights reserved.