Characteristics of Printed Thin Films Using Indium Tin Oxide (ITO) Ink

Characteristics of Printed Thin Films Using Indium Tin Oxide (ITO) Ink
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使用氧化铟锡 (ITO) 墨水印刷薄膜的特性

DOI:
10.2320/matertrans.maw201017
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发表时间:
2010
影响因子:
1.2
通讯作者:
M. Isshiki
M. Isshiki
中科院分区:
材料科学4区
文献类型:
--
作者:
Sung‐Jei Hong;Jong‐Woong Kim;Jaewon Lim;G. Choi;M. Isshiki

文献摘要

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研究了直接印刷法制备的氧化铟锡(ITO)薄膜的特性。对于直接印刷,通过将直径小于10 nm的ITO纳米粒子分散到含有添加剂的醇基溶剂中来配制30质量%的ITO墨水。然后,将ITO油墨印刷到玻璃基板上,随后在350、400、500和600℃下进行热处理以制造烧结膜。然后,观察烧结膜的截面。结果,ITO薄膜呈现出多孔纳米结构。此外,ITO薄膜的薄层电阻随着加热温度的升高而降低。电阻的降低归因于ITO薄膜中载流子浓度的提高。同时,光学透过率与加热温度成正比增加。在600℃加热的ITO薄膜的情况下,电阻和光透射率的改善特性分别达到2.19×10 3 Ω/sq和78.6%。
Characteristics of the indium tin oxide (ITO) thin films fabricated by a direct printing method were investigated. For the direct printing, 30 mass% ITO ink was formulated by dispersing ITO nanoparticles of less than 10 nm in diameter into alcohol based solvent with additives. Then, the ITO ink was printed onto a glass substrate, which was followed by the heat treatment at 350, 400, 500 and 600°C to fabricate the sintered films. Then, cross-section of sintered film was observed. As a result, the ITO thin film showed porous nanostructure. Also, sheet resistance of the ITO thin film decreased with increasing heating temperature. The decrease of the resistance was attributed to the improvement of carrier concentration in the ITO thin film. In the meanwhile, the optical transmittance increased in proportional to the heating temperature. In case of the ITO thin film heated at 600°C, the improved characteristics of the electrical resistance and the optical transmittance were achieved as 2.19 × 10 3 Ω/sq and 78.6%, respectively.