Piezoelectric shear mode drop-on-demand inkjet actuator
Piezoelectric shear mode drop-on-demand inkjet actuator
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DOI：
10.1016/s0924-4247(02)00212-1
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发表时间：
2002-10-30
影响因子：
4.6
通讯作者：
Grishin, AM
中科院分区：
文献类型：
--
作者：
Brünahl, J;Grishin, AM
我们报告的压电剪切模式喷墨致动器微加工成散装Pb（Zr0.53Ti0.47）O-3（PZT）陶瓷的综合表征。本文首先概述了不同的按需喷墨系统，而主要的注意力，然后转向特定的Xaar型压电剪切模式喷墨打印头。它们是复杂的微机电系统（MEMS）的一个例子，并且包括128个活性墨水通道（75 μ m宽和360 μ m深）的铁电阵列。给出了有关制造工艺和工作原理的详细信息。由于128个通道的每个致动壁是从两侧金属化的压电电容器，以通过电脉冲激活，通道壁（CW）的电特性易于测试，并且用作原始状态下以及高压/高温重载后的致动器性能的指纹。我们提出了几种技术来控制制造过程和疲劳效应。因此，连续波和脉冲光谱以及磁滞回线跟踪表明，与原始PZT陶瓷状态相比，（ε '）减少了三倍，损耗因子（tan δ）从初始的4.8%增加到6.6%，剩余极化降低了43%，矫顽场增加了38%，而居里温度在90 ℃后从508 K增加到560 K，在电场强度为88.5kV/cm、频率为50 Hz的条件下，铁电滞后P-E回线可达000次。热处理也会导致PZT陶瓷的退化：光学频闪技术显示，耦合系数（k（15））和喷墨性能的退化明显降低：电疲劳致动器中的液滴速度和体积降低8.7%和14%，温度处理致动器中的液滴速度降低2.5%，而液滴体积不变。(C)2002 Elsevier Science B. V.保留所有权利。
We report on comprehensive characterization of piezoelectric shear mode inkjet actuators micromachined into bulk Pb(Zr0.53Ti0.47)O-3 (PZT) ceramics. The paper starts with an overview of different drop-on-demand inkjet systems, whereas the main attention is then turned on particular Xaar-type piezoelectric shear mode inkjet printheads. They are an example of complex microelectromechanical system (MEMS) and comprise a ferroelectric array of 128 active ink channels (75 mum wide and 360 mum deep). Detailed information about fabrication process and principles of operation are given. Since each actuating wall of 128 channels is a piezoelectric capacitor metallized from both sides to be animated by electric pulse, electrical properties of channel walls (CWs) are easy to test and serve as a fingerprint of actuator performance in the virgin state as well as after high voltage/elevated temperature heavy duties. We present several techniques to control manufacturing process and fatigue effects. So, continuous wave and pulsed spectroscopy and hysteresis P-E loop tracing showed that compared to a virgin PZT ceramics state, dielectric permittivity (epsilon') was reduced three times, the loss factor (tan delta) increased from initial 4.8 to 6.6%, remnant polarization decreased by 43%, coercive field increased by 38%, whereas Curie temperature increased from 508 to 560 K after 90,000 cycles of ferroelectric hysteresis P-E loop tracing at 50 Hz at electric field of 88.5 kV/cm. Heat treatment also results in PZT ceramics degradation: appreciable reduction of the coupling coefficient (k(15)) and the degradation of inkjet performance were revealed by optical stroboscope technique: 8.7 and 14% reduction of drop velocity and volume in electrically fatigued actuator, 2.5% reduction of drop velocity and unchanged drop volume in temperature-treated actuators. (C) 2002 Elsevier Science B.V. All rights reserved.