TiN–Fe Vertically Aligned Nanocomposites Integrated on Silicon as a Multifunctional Platform toward Device Applications
TiN–Fe Vertically Aligned Nanocomposites Integrated on Silicon as a Multifunctional Platform toward Device Applications
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DOI：
10.3390/cryst12060849
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发表时间：
2022-06
期刊：
影响因子：
2.7
通讯作者：
M. Kalaswad;Di Zhang;Bethany X. Rutherford;Juanjuan Lu;J. P. Barnard;Zihao He;Juncheng Liu;Haohan Wang;Xiaoshan Xu;Haiyan Wang
中科院分区：
文献类型：
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作者：
M. Kalaswad;Di Zhang;Bethany X. Rutherford;Juanjuan Lu;J. P. Barnard;Zihao He;Juncheng Liu;Haohan Wang;Xiaoshan Xu;Haiyan Wang
过渡金属氮化物如氮化钛（TiN）具有优异的机械、化学和热稳定性，并已广泛应用于各种应用，从超硬、耐腐蚀、装饰涂层到半导体器件中的纳米级扩散屏障。尽管人们对这些坚固耐用的材料一直很感兴趣，但关于具有各向异性磁性和光学性能的高纵横比tin基纳米复合材料的工程报道有限。为此，我们探索了具有自组装垂直结构集成在Si衬底上的TiN-Fe薄膜。我们发现单个组分的关键物理性质（例如铁的铁磁性）被保留了下来，垂直纳米结构促进了各向异性行为，TiN和Fe之间的相互作用使特殊的磁光响应成为可能。这种TiN-Fe纳米复合系统提供了一组新的复杂多功能杂化材料，可以集成在Si上，用于未来的Si基存储，光学和生物相容性器件。
Transition metal nitrides such as titanium nitride (TiN) possess exceptional mechanical-, chemical-, and thermal-stability and have been utilized in a wide variety of applications ranging from super-hard, corrosion-resistive, and decorative coatings to nanoscale diffusion barriers in semiconductor devices. Despite the ongoing interest in these robust materials, there have been limited reports focused on engineering high-aspect ratio TiN-based nanocomposites with anisotropic magnetic and optical properties. To this end, we explored TiN–Fe thin films with self-assembled vertical structures integrated on Si substrates. We showed that the key physical properties of the individual components (e.g., ferromagnetism from Fe) are preserved, that vertical nanostructures promote anisotropic behavior, and interactions between TiN and Fe enable a special magneto-optical response. This TiN–Fe nanocomposite system presents a new group of complex multifunctional hybrid materials that can be integrated on Si for future Si-based memory, optical, and biocompatible devices.